Samsung Ventures led a $11.2m round for the nanoscale manufacturing technology developer that included Intel Capital, Hitachi High-Technologies, MKS, Lam Research and SK Hynix.

Canada-based semiconductor and microelectronic technology developer Reno Sub Systems has closed an $11.2m series C round led by Samsung Ventures, an investment subsidiary of consumer electronics manufacturer Samsung Electronics.

Intel Capital, the corporate venture capital arm of semiconductor maker Intel, also participated, along with electronics producer Hitachi High-Technologies, manufacturing technology provider MKS Instruments and semiconductor producers Lam Research and SK Hynix.

Reno develops radio frequency matching networks, power generators and gas delivery systems for use in nanoscale manufacturing. It will…