Air Liquide, Samsung, Intel and Tokyo Ohka Kogyo have provided $10m for semiconductor photoresist maker Inpria, effectively doubling its total funding.

US-based semiconductor manufacturing technology producer Inpria Corporation closed a round led by industrial gas technology company Air Liquide on Tuesday that was sized at $10m, according to The Oregonian.

The round included Samsung Venture Investment Corporation and Intel Capital, respective subsidiaries of electronics producer Samsung and chipmaker Intel, and photolithography technology manufacturer Tokyo Ohka Kogyo.

Air Liquide participated through its strategic investment arm, Air Liquide Venture Capital.

Inpria supplies high-resolution photoresists for semiconductor manufacturing. It will use the funding to…

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