Mapper's other shareholders include Delft University of Technology and VC firms KBC Private Equity and Quest for Growth.
Mapper Lithography, a Netherlands-based chip equipment provider founded in 2000, has gained €80m ($100m) from a consortium including Russian state-backed venture capital fund Rusnano.
Rusnano, a $10bn fund which invests in US and Russian companies so they will set up operations in Russia (Bloomberg story here Story), will provide half the round.
Mapper’s existing shareholders, including ADP Industries, the investment vehicle for Arthur del Prado, co-founder of chip peer ASM International (ASMI), technology suppliers such as Technolution…