The fabless chip technology developer has closed a series C round featuring Tokyo Electron, a company which produces its own semiconductor equipment.

Luxtera, a US-based company developing photonics technology for use in fabless semiconductors, completed a $21.7m series C round on Monday which saw participation from backers including industrial electronics company Tokyo Electron.

Venture capital firms New Enterprise Associates, August Capital, Sevin Rosen Funds and Lux Capital also took part in the round, which took Luxtera’s overall funding to $186.7m, according to SEC filings. Past investors also include private research university the California Institute of Technology and VC investment bank Advanced Equities.