MKS Instruments led the round, providing $9.3m, while Intel Capital returned to reinvest in Reno, almost 18 months after taking part in its series A.
Manufacturing technology producer MKS Instruments invested $9.3m in US-based semiconductor and microelectronics technology provider Reno Sub Systems on Monday as part of a $14m series B round.
The MKS-led round also included Intel Capital, which acts as semiconductor technology manufacturer Intel’s corporate venturing arm, and an undisclosed original equipment manufacturing technology supplier.
Reno develops radio frequency matching networks and power generators, as well as gas delivery systems, to be used in nanoscale manufacturing. It will use the series B capital…
